Helium detector

production capacity

≥12ppm

The degree of vacuum in the sealed cavity was detected

≤40Pa;

vacuum pump

Limit vacuum ≤5Pa, pumping speed ≥250L/min, pumping time ≤8s;

Minimum detectable leak rate

5.0×10-13 Pa·m³/s;

Leakage rate display range

5.0×10-13 Pa·m³/s～1.0×10-3 Pa·m³/s;

Response time

≤1s

Start time of helium mass spectrometer

≤2min;

Maximum leak pressure

1500Pa;